Product Product ISO 18115-3:2022
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Description Description

This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.

Standard Number Standard Number ISO 18115-3:2022
Title Title ISO 18115-3:2022 Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
Status Status Published
Publication Date Publication Date 30 Jun 2022
Cross References Cross References
Descriptors Descriptors
ICS ICS 01.040.71
Committee Committee ISO/TC 201/SC 1 Terminology
Publisher Publisher PECB Store
Format Format PDF
Delivery Delivery NO
Pages Pages 35
File Size File Size KB