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Product Product ISO/TS 22933:2022
Price Price USD 106.00
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Description Description

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

Standard Number Standard Number ISO/TS 22933:2022
Title Title ISO/TS 22933:2022 Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
Status Status Published
Publication Date Publication Date 01 Apr 2022
Cross References Cross References
Descriptors Descriptors
ICS ICS 71.040.40
Committee Committee ISO/TC 201/SC 6 Secondary ion mass spectrometry
ISBN ISBN
Publisher Publisher PECB Store
Format Format PDF
Delivery Delivery NO
Pages Pages 15
File Size File Size KB