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ISO 18114:2021
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| Price | Price USD 46.00 | ||
| Rating | Rating | ||
| Buy | Buy Add to Cart | ||
| Description |
Description
This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials. The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent. |
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| Standard Number | Standard Number ISO 18114:2021 | ||
| Title | Title ISO 18114:2021 Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials | ||
| Status | Status Published | ||
| Publication Date | Publication Date 11 May 2021 | ||
| Cross References | Cross References | ||
| Descriptors | Descriptors | ||
| ICS | ICS 71.040.40 | ||
| Committee | Committee ISO/TC 201/SC 6 Secondary ion mass spectrometry | ||
| ISBN | ISBN | ||
| Publisher | Publisher PECB Store | ||
| Format | Format PDF | ||
| Delivery | Delivery NO | ||
| Pages | Pages 4 | ||
| File Size | File Size KB |
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