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Product Product ISO 23131:2021
Price Price USD 106.00
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Description Description

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.

It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

Standard Number Standard Number ISO 23131:2021
Title Title ISO 23131:2021 Ellipsometry — Principles
Status Status Published
Publication Date Publication Date 22 Apr 2021
Cross References Cross References
Descriptors Descriptors
ICS ICS 17.020
Committee Committee ISO/TC 107 Metallic and other inorganic coatings
ISBN ISBN
Publisher Publisher PECB Store
Format Format PDF
Delivery Delivery NO
Pages Pages 15
File Size File Size KB