ISO/TS 22933

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ISO/TS 22933:2022

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ISO/TS 22933:2022 Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS

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USD 106.00

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

Standard Number ISO/TS 22933:2022
Title ISO/TS 22933:2022 Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
Status Published
Publication Date 01 Apr 2022
Committee ISO/TC 201/SC 6 Secondary ion mass spectrometry
Publisher PECB Store
Format PDF
Pages 15
Price USD 106.00
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