ISO 18115-3

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ISO 18115-3:2022

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ISO 18115-3:2022 Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis

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This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.

Standard Number ISO 18115-3:2022
Title ISO 18115-3:2022 Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
Status Published
Publication Date 30 Jun 2022
Committee ISO/TC 201/SC 1 Terminology
Publisher PECB Store
Format PDF
Pages 35
Price USD 46.00
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