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This document specifies a method for non-destructive measurements of the thickness of conductive coatings on non-conductive base materials. This method is based on the principle of the sheet resistivity measurement and is applicable to any conductive coatings and layers of metal and semiconductor materials. In general, the probe has to be adjusted to the conductivity and the thickness of the respective application. However, this document focuses on metallic coatings on non-conductive base materials (e.g. copper on plastic substrates, printed circuit boards).

This method is also applicable to thickness measurements of conductive coatings on conductive base materials, if the resistivity of the coating and the base material is significantly different. However, this case is not considered in this document.